CAPT 3600: Introduction to Micro Electro-Mechanical Systems (MEMS)

Instructor: Dr. Victor Bright

Course Description:

MEMS technology uses established CMOS on silicon processing technology to produce miniaturized electro-mechanical and micro-optical-electro-mechanical systems that have feature sizes in the regime of 1 micron. Controllable motions from nanometers to millimeters can be realized with this technology for applications in the area of projection displays, photonic telecommunications, microwave communication, information storage, and industrial and consumer instrumentation and control.

This course is designed to provide an overview of MEMS technology and MEMS applications. The course addresses MEMS modeling, design, fabrication and packaging. The instructor will discuss the general types of assemblies that can be constructed from MEMS technology and provide general guidelines on feature sizes, degrees of freedom of motion, range and resolution of motion. The attendees will be given a clear picture of the technology so that they can envision applicability of the technology to their specific industry.

In the photonics arena, the course will cover grating and phased arrays, adaptive optics, beam steering, fiber-optic switching and miromachined detectors.

MEMS will also be examined as a generic mechanical transducer applicable as a linear or rotary actuator of as a sensor mechanism for temperature, acceleration, or biological phenomena.

Finally, an overview of known and potential applications will be provided that includes data storage, optical communication, medical instrumentation, robotics and navigation. Also the use of MEMS as a variable RF component or a component in a fluidic system will be discussed.

Who should attend:

This course is intended for business and technical executive, product engineers and designers who think that MEMS technology may have an application in their product area. The attendee should leave with a good understanding of the capability and limitation of the technology. Furthermore, the attendee will understand how to proceed if there is a further interest and need.

About the Instructor

Professor Victor Bright is the Director of the MEMS R&D Laboratory and an Associate Professor at the University of Colorado at Boulder. He serves on the Executive Committee of the ASME MEMS Sub-division. His research activities include MEMS, silicon micromachining, microsensors, microactuators, opto-electronics, microelectronics, and MEMS packaging. He has authored or co-authored 70 papers in the area of MEMS. At various conferences, he has been awarded "Best Paper" recognition on three separate occasions. Dr. Bright received his BSEE from University of Colorado at Denver and a MS and PH.D. from the Georgia Institute of Technology.

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Contact Demetria Acker @ 303 365-8409 or Fax 303 365-8411, Register on the web at URL: www.captcenter.org

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